JPH0336520Y2 - - Google Patents

Info

Publication number
JPH0336520Y2
JPH0336520Y2 JP1986144149U JP14414986U JPH0336520Y2 JP H0336520 Y2 JPH0336520 Y2 JP H0336520Y2 JP 1986144149 U JP1986144149 U JP 1986144149U JP 14414986 U JP14414986 U JP 14414986U JP H0336520 Y2 JPH0336520 Y2 JP H0336520Y2
Authority
JP
Japan
Prior art keywords
plate
gas
metal plate
porous metal
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986144149U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6350878U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986144149U priority Critical patent/JPH0336520Y2/ja
Publication of JPS6350878U publication Critical patent/JPS6350878U/ja
Application granted granted Critical
Publication of JPH0336520Y2 publication Critical patent/JPH0336520Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Chemical Vapour Deposition (AREA)
JP1986144149U 1986-09-22 1986-09-22 Expired JPH0336520Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986144149U JPH0336520Y2 (en]) 1986-09-22 1986-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986144149U JPH0336520Y2 (en]) 1986-09-22 1986-09-22

Publications (2)

Publication Number Publication Date
JPS6350878U JPS6350878U (en]) 1988-04-06
JPH0336520Y2 true JPH0336520Y2 (en]) 1991-08-02

Family

ID=31054492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986144149U Expired JPH0336520Y2 (en]) 1986-09-22 1986-09-22

Country Status (1)

Country Link
JP (1) JPH0336520Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741367A (en) * 1980-08-25 1982-03-08 Fujitsu Ltd Chemical vapor deposition device
JPS58163432A (ja) * 1982-03-24 1983-09-28 Fujitsu Ltd プラズマ化学気相成長装置

Also Published As

Publication number Publication date
JPS6350878U (en]) 1988-04-06

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